Beheim, Glenn M. : rechercher sur Z-Library

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Articles (62)
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1

Loss-compensation technique for fiber-optic sensors and its application to displacement measurements

Journal:

Année:

1987

Langue:

english

Fichier:

PDF, 512 KB

english, 1987

2

Packaging Technologies for 500°C SiC Electronics and Sensors

Chen, Liang Yu, Johnson, R. Wayne, Neudeck, Philip G., Beheim, Glenn M., Spry, David J., Meredith, Roger D., Hunter, Gary W.

Journal:

Materials Science Forum

Année:

2012

Langue:

english

Fichier:

PDF, 1.21 MB

english, 2012

3

Modern trends in microstructures and integrated optics for communication, sensing, and actuation

Journal:

Optical Engineering

Année:

1997

Langue:

english

Fichier:

PDF, 402 KB

english, 1997

4

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA, United States (Wednesday 1 February 1995)] Micro-Optics/Micromechanics and Laser Scanning and Shaping - Calculated coupling efficiency between an elliptical-core optical fiber and a silicon oxynitride rib waveguide

Tuma, Meg L., Beheim, Glenn

Année:

1995

Langue:

english

Fichier:

PDF, 364 KB

english, 1995

5

[IEEE 2016 IEEE 66th Electronic Components and Technology Conference (ECTC) - Las Vegas, NV, USA (2016.5.31-2016.6.3)] 2016 IEEE 66th Electronic Components and Technology Conference (ECTC) - Demonstration of a Packaged Capacitive Pressure Sensor System Suitable for Jet Turbofan Engine Health Monitoring

Scardelletti, Maximilian C., Jordan, Jennifer L., Meredith, Roger D., Harsh, Kevin, Pilant, Evan, Ursey, Michael W., Beheim, Glenn M., Hunter, Gary W., Zorman, Christian A.

Année:

2016

Langue:

english

Fichier:

PDF, 1.60 MB

english, 2016

6

Extreme temperature 6H-SiC JFET integrated circuit technology

Philip G. Neudeck, Steven L. Garverick, David J. Spry, Liang-Yu Chen, Glenn M. Beheim, Michael J. Krasowski, Mehran Mehregany

Journal:

physica status solidi (a)

Année:

2009

Langue:

english

Fichier:

PDF, 1.32 MB

english, 2009

7

Remote displacement measurement using a passive interferometer with a fiber-optic link

Journal:

Année:

1985

Langue:

english

Fichier:

PDF, 735 KB

english, 1985

8

Range finding using frequency-modulated laser diode

Beheim, Glenn, Fritsch, Klaus

Journal:

Année:

1986

Langue:

english

Fichier:

PDF, 906 KB

english, 1986

9

Fiber-optic interferometer using frequency-modulated laser diodes

Journal:

Année:

1986

Langue:

english

Fichier:

PDF, 703 KB

english, 1986

10

Fiber optic phase stepping system for interferometry

Mercer, Carolyn R., Beheim, Glenn

Journal:

Année:

1991

Langue:

english

Fichier:

PDF, 589 KB

english, 1991

11

Integrated Optical Micromachined Pressure Sensor with Spectrally Encoded Output and Temperature Compensation

De Brabander, Gregory N., Beheim, Glenn, Boyd, Joseph T.

Journal:

Année:

1998

Langue:

english

Fichier:

PDF, 152 KB

english, 1998

12

SPIE Proceedings [SPIE Optical Tools for Manufacturing and Advanced Automation - Boston, MA (Tuesday 7 September 1993)] Fiber Optic and Laser Sensors XI - Laser-annealed Fabry-Perot fiber optic temperature sensor

Sotomayor, Jorge L., Beheim, Glenn, DePaula, Ramon P.

Année:

1994

Langue:

english

Fichier:

PDF, 374 KB

english, 1994

13

[American Institute of Aeronautics and Astronautics 30th Joint Propulsion Conference and Exhibit - Indianapolis,IN,U.S.A. (27 June 1994 - 29 June 1994)] 30th Joint Propulsion Conference and Exhibit - Sensors formed with optical waveguides and micromechanical structures on silicon

Boyd, Joseph, De Brabander, N., Burcham, E., Beheim, Glenn

Année:

1994

Langue:

english

Fichier:

PDF, 570 KB

english, 1994

14

SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Laser-annealed thin-film fiber-optic temperature sensor

Beheim, Glenn, Sotomayor, Jorge L., Tuma, Meg L., Tabib-Azar, Massood, Boyd, Ian W.

Année:

1994

Langue:

english

Fichier:

PDF, 146 KB

english, 1994

15

Growth of step-free surfaces on device-size (0001)SiC mesas

Powell, J. Anthony, Neudeck, Philip G., Trunek, Andrew J., Beheim, Glenn M., Matus, Lawrence G., Hoffman, Richard W., Keys, Luann J.

Journal:

Applied Physics Letters

Année:

2000

Langue:

english

Fichier:

PDF, 544 KB

english, 2000

16

Stable Electrical Operation of 6H–SiC JFETs and ICs for Thousands of Hours at 500 $^{\circ}\hbox{C}$

Neudeck, Philip G., Spry, David J., Chen, Liang-Yu, Beheim, Glenn M., Okojie, Robert S., Chang, Carl W., Meredith, Roger D., Ferrier, Terry L., Evans, Laura J., Krasowski, Michael J., Prokop, Norman F

Journal:

IEEE Electron Device Letters

Année:

2008

Langue:

english

Fichier:

PDF, 429 KB

english, 2008

17

[IEEE 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) - Newport Beach, CA, USA (2014.1.19-2014.1.23)] 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) - Wireless seismometer for venus

Ponchak, George E., Scardelletti, Maximilian C., Taylor, Brandt, Beard, Steve, Clougherty, Brian, Meredith, Roger D., Beheim, Glenn M., Kiefer, Walter S., Hunter, Gary W.

Année:

2014

Langue:

english

Fichier:

PDF, 7.22 MB

english, 2014

18

[IEEE 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) - Newport Beach, CA, USA (2014.1.19-2014.1.23)] 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) - Wireless capacitive pressure sensor operating up to 400°c from 0 to 100 psi utilizing power scavenging

Scardelletti, Maximilian C., Ponchak, George E., Harsh, Kevin, Mackey, Jonathan A., Meredith, Roger D., Zorman, Christian A., Beheim, Glenn M., Dynys, Frederick W., Hunter, Gary W.

Année:

2014

Langue:

english

Fichier:

PDF, 6.03 MB

english, 2014

19

[IEEE 2012 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet) - Santa Clara, CA, USA (2012.01.15-2012.01.18)] 2012 IEEE Topical Conference on Wireless Sensors and Sensor Networks - High temperature, wireless seismometer sensor for Venus

Ponchak, George E., Scardelletti, Maximilian C., Taylor, Brandt, Beard, Steve, Meredith, Roger D., Beheim, Glenn M., Hunter, Gary W., Kiefer, Walter S.

Année:

2012

Langue:

english

Fichier:

PDF, 223 KB

english, 2012

20

Enlargement of step-free SiC surfaces by homoepitaxial web growth of thin SiC cantilevers

Neudeck, Philip G., Powell, J. Anthony, Beheim, Glenn M., Benavage, Emye L., Abel, Phillip B., Trunek, Andrew J., Spry, David J., Dudley, Michael, Vetter, William M.

Journal:

Journal of Applied Physics

Année:

2002

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2002

21

Fabrication and Testing of 6H-SiC JFETs for Prolonged 500 °C Operation in Air Ambient

Spry, David J., Neudeck, Philip G., Chen, Liang Yu, Beheim, Glenn M., Okojie, Robert S., Chang, Carl W., Meredith, Roger D., Ferrier, Terry L., Evans, Laura J.

Journal:

Materials Science Forum

Année:

2009

Langue:

english

Fichier:

PDF, 353 KB

english, 2009

22

Fracture Origins in Miniature Silicon Carbide Structures

Quinn, George D., Sharpe, William N., Beheim, Glenn M., Nemeth, Noel N., Jadaan, Osama

Journal:

Key Engineering Materials

Année:

2005

Langue:

english

Fichier:

PDF, 7.89 MB

english, 2005

23

Prolonged 500 °C Operation of 6H-SiC JFET Integrated Circuitry

Neudeck, Philip G., Spry, David J., Chen, Liang Yu, Chang, Carl W., Beheim, Glenn M., Okojie, Robert S., Evans, Laura J., Meredith, Roger D., Ferrier, Terry L., Krasowski, Michael J., Prokop, Norman F

Journal:

Materials Science Forum

Année:

2009

Langue:

english

Fichier:

PDF, 575 KB

english, 2009

24

Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures Using a Time-Multiplexed Etch-Passivate Process

Evans, Laura J., Beheim, Glenn M.

Journal:

Materials Science Forum

Année:

2006

Langue:

english

Fichier:

PDF, 1.13 MB

english, 2006

25

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - An Overview of Wide Bandgap SiC Sensor and Electronics Development at NASA Glenn Research Center

Hunter, G., Neudeck, Philip G., Beheim, Glenn, Okojie, Robert S., Chen, Liangyu, Spry, David J., Trunek, Andrew

Année:

2007

Langue:

english

Fichier:

PDF, 448 KB

english, 2007

26

High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator

Meredith, Roger D., Neudeck, Philip G., Ponchak, G.E., Beheim, Glenn M., Scardelletti, M.C., Jordan, J.L., Chen, L.Y., Spry, David J., Krasowski, Michael J., Hunter, Gary W.

Journal:

Materials Science Forum

Année:

2012

Langue:

english

Fichier:

PDF, 533 KB

english, 2012

27

SiC Field Effect Transistor Technology Demonstrating Prolonged Stable Operation at 500 °C

Neudeck, Philip G., Spry, David J., Chen, Liang Yu, Okojie, Robert S., Beheim, Glenn M., Meredith, Roger, Ferrier, Terry L.

Journal:

Materials Science Forum

Année:

2007

Langue:

english

Fichier:

PDF, 651 KB

english, 2007

28

6H-SiC Lateral JFETs for Analog Integrated Circuits

Fu, Xiao An, Patil, Amita, Neudeck, Philip G., Beheim, Glenn M., Garverick, Steven, Mehregany, Mehran

Journal:

Materials Science Forum

Année:

2009

Langue:

english

Fichier:

PDF, 369 KB

english, 2009

29

Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces

Neudeck, Philip G., Powell, J. Anthony, Trunek, Andrew J., Spry, David J., Beheim, Glenn M., Benavage, Emye, Abel, Phillip B., Vetter, William M., Dudley, Michael

Journal:

Materials Science Forum

Année:

2002

Langue:

english

Fichier:

PDF, 583 KB

english, 2002

30

Control of Trenching and Surface Roughness in Deep Reactive Ion Etched 4H and 6H SiC

Beheim, Glenn M., Evans, Laura J.

Journal:

MRS Proceedings

Année:

2006

Langue:

english

Fichier:

PDF, 463 KB

english, 2006

31

Silicon Carbide Differential Amplifiers for High-Temperature Sensing

Patil, Amita, Fu, Xiao An, Neudeck, Philip G., Beheim, Glenn M., Mehregany, Mehran, Garverick, Steven

Journal:

Materials Science Forum

Année:

2009

Langue:

english

Fichier:

PDF, 456 KB

english, 2009

32

[American Institute of Aeronautics and Astronautics AIAA Space 2001 Conference and Exposition - Albuquerque,NM,U.S.A. (28 August 2001 - 30 August 2001)] AIAA Space 2001 Conference and Exposition - Characteristics of a hermetic 6H-SiC pressure sensor at 600 C

Okojie, Robert, Saad, George, Beheim, Glenn, Savrun, Ender

Année:

2001

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2001

33

SPIE Proceedings [SPIE Defense and Security Symposium - Orlando (Kissimmee), FL (Monday 17 April 2006)] Sensors for Propulsion Measurement Applications - Development and application of high-temperature sensors and electronics for propulsion applications

Hunter, Gary W., Wrbanek, John D., Okojie, Robert S., Neudeck, Philip G., Fralick, Gustave C., Chen, Liangyu, Xu, Jennifer, Beheim, Glenn M., Korman, Valentin

Année:

2006

Langue:

english

Fichier:

PDF, 912 KB

english, 2006

34

Long-Term Characterization of 6H-SiC Transistor Integrated Circuit Technology Operating at 500 °C

Neudeck, Philip, Spry, David J., Chen, Liang-Yu, Chang, Carl W., Beheim, Glenn M., Okojie, Robert S., Evans, Laura J., Meredith, Roger D., Ferrier, Terry L., Krasowski, Michael J., Prokop, Norman F.

Journal:

MRS Proceedings

Année:

2008

Langue:

english

Fichier:

PDF, 579 KB

english, 2008

35

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Development of High Temperature Wireless Sensor Technology Based on Silicon Carbide Electronics

Hunter, G., Beheim, Glenn, Ponchak, George, Scardelleti, Maximillan, Meredith, Roger, Dynys, Fred, Neudeck, Philip, Jordan, Jennifer, Chen, Liang-Yu

Année:

2010

Langue:

english

Fichier:

PDF, 345 KB

english, 2010

36

SPIE Proceedings [SPIE OE/FIBERS '89 - Boston (Tuesday 5 September 1989)] Fiber Optic and Laser Sensors VII - Digital Angular Position Sensor Using Wavelength Division Multiplexing

Fritsch, Klaus, Beheim, Glenn, Sotomayor, Jorge, DePaula, Ramon P., Udd, Eric

Année:

1990

Langue:

english

Fichier:

PDF, 10.30 MB

english, 1990

37

SPIE Proceedings [SPIE Photonics West '96 - San Jose, CA (Saturday 27 January 1996)] Integrated Optics and Microstructures III - Magnetron plasma etching of SiC for microstructures

Beheim, Glenn, Salupo, Carl, Tabib-Azar, Massood

Année:

1996

Langue:

english

Fichier:

PDF, 283 KB

english, 1996

38

Electrical Characterization of a 4H-SiC JFET Wafer: DC Parameter Variations for Extreme Temperature IC Design

Neudeck, Philip G., Chen, Liang Yu, Spry, David J., Beheim, Glenn M., Chang, Carl W.

Journal:

Materials Science Forum

Année:

2015

Langue:

english

Fichier:

PDF, 504 KB

english, 2015

39

An Overview of High-Temperature Electronics and Sensor Development at NASA Glenn Research Center

Hunter, Gary W., Neudeck, Philip G., Okojie, Robert S., Beheim, Glenn M., Powell, J. A., Chen, Liangyu

Journal:

Journal of Turbomachinery

Année:

2003

Langue:

english

Fichier:

PDF, 520 KB

english, 2003

40

Prolonged 500 °C Demonstration of 4H-SiC JFET ICs with Two-Level Interconnect

Spry, David J., Neudeck, Philip G., Chen, Liang-Yu, Lukco, Dorothy, Chang, Carl W., Beheim, Glenn M.

Journal:

IEEE Electron Device Letters

Année:

2016

Langue:

english

Fichier:

PDF, 312 KB

english, 2016

41

Deep RIE Process for Silicon Carbide Power Electronics and MEMS

Beheim, Glenn, Salupo, Carl S.

Journal:

MRS Proceedings

Année:

2000

Langue:

english

Fichier:

PDF, 634 KB

english, 2000

42

Confinement of Screw Dislocations to Predetermined Lateral Positions in (0001) 4H-SiC Epilayers Using Homoepitaxial Web Growth

Neudeck, Philip G., Spry, David J., Trunek, Andrew J., Anthony, J., Beheim, Glenn M.

Journal:

MRS Proceedings

Année:

2002

Langue:

english

Fichier:

PDF, 1.92 MB

english, 2002

43

SPIE Proceedings [SPIE SPIE Defense + Security - Baltimore, Maryland, United States (Sunday 17 April 2016)] Micro- and Nanotechnology Sensors, Systems, and Applications VIII - Experimental Durability Testing of 4H SiC JFET Integrated Circuit Technology at 727 °C

George, Thomas, Dutta, Achyut K., Islam, M. Saif, Spry, David, Neudeck, Phil, Chen, Liangyu, Chang, Carl, Lukco, Dorothy, Beheim, Glenn

Année:

2016

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2016

44

SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Integrated Optics and Microstructures II - Integrated optical interferometer with micromechanical diaphragm for pressure sensing

De Brabander, Gregory N., Boyd, Joseph T., Beheim, Glenn, Tabib-Azar, Massood, Polla, Dennis L., Wong, Ka-Kha

Année:

1994

Langue:

english

Fichier:

PDF, 242 KB

english, 1994

45

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Fiber Optic and Laser Sensors VI - Modulated-Splitting-Ratio Fiber-Optic Temperature Sensor

Beheim, Glenn, Anthan, Donald J., Rys, John R., Fritsch, Klaus, Ruppe, Walter R., DePaula, Ramon P., Udd, Eric

Année:

1989

Langue:

english

Fichier:

PDF, 428 KB

english, 1989

46

SPIE Proceedings [SPIE 32nd Annual Technical Symposium - San Diego, CA (Monday 15 August 1988)] Current Developments in Optical Engineering III - Active Phase Compensation System For Fiber Optic Holography

Mercer, Carolyn R., Beheim, Glenn, Fischer, Robert E., Smith, Warren J.

Année:

1989

Langue:

english

Fichier:

PDF, 196 KB

english, 1989

47

SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Integrated Optics and Microstructures II - Fiber optic temperature sensor using laser-annealed silicon film

Beheim, Glenn, Sotomayor, Jorge L., Tuma, Meg L., Tabib-Azar, Massood, Tabib-Azar, Massood, Polla, Dennis L., Wong, Ka-Kha

Année:

1994

Langue:

english

Fichier:

PDF, 198 KB

english, 1994

48

SPIE Proceedings [SPIE Fibers '92 - Boston, MA (Tuesday 8 September 1992)] Integrated Optics and Microstructures - Fourier transform spectrometry for fiber-optic sensor systems

Beheim, Glenn, Tuma, Meg L., Sotomayor, Jorge L., Flatico, Joseph M., Tabib-Azar, Massood, Polla, Dennis L.

Année:

1993

Langue:

english

Fichier:

PDF, 252 KB

english, 1993

49

SPIE Proceedings [SPIE OE Fiber - DL tentative - Boston, MA (Sunday 1 September 1991)] Fiber Optic and Laser Sensors IX - Fiber optic thermometer using Fourier transform spectroscopy

Beheim, Glenn, Sotomayor, Jorge L., Flatico, Joseph M., Tabib-Azar, Massood, DePaula, Ramon P., Udd, Eric

Année:

1991

Langue:

english

Fichier:

PDF, 472 KB

english, 1991

50

SPIE Proceedings [SPIE Microlithography '91, San Jose,CA - San Jose, CA (Sunday 3 March 1991)] Fiber Optic Systems for Mobile Platforms IV - Wavelength-multiplexed fiber optic position encoder for aircraft control systems

Beheim, Glenn, Krasowski, Michael J., Sotomayor, Jorge L., Fritsch, Klaus, Flatico, Joseph M., Bathurst, Richard L., Eustace, John G., Anthan, Donald J., Lewis, Norris E., Moore, Emery L.

Année:

1991

Langue:

english

Fichier:

PDF, 637 KB

english, 1991